JPH0418426U - - Google Patents
Info
- Publication number
- JPH0418426U JPH0418426U JP6043090U JP6043090U JPH0418426U JP H0418426 U JPH0418426 U JP H0418426U JP 6043090 U JP6043090 U JP 6043090U JP 6043090 U JP6043090 U JP 6043090U JP H0418426 U JPH0418426 U JP H0418426U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- exposure
- section
- mask
- exposes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 3
- 230000007547 defect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6043090U JPH0418426U (en]) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6043090U JPH0418426U (en]) | 1990-06-06 | 1990-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418426U true JPH0418426U (en]) | 1992-02-17 |
Family
ID=31587787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6043090U Pending JPH0418426U (en]) | 1990-06-06 | 1990-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418426U (en]) |
-
1990
- 1990-06-06 JP JP6043090U patent/JPH0418426U/ja active Pending